The semiconductor industry is ever-changing with demanding requirements, but one thing has stayed constant: the applications in this field have specific needs that necessitate low defects and precise temperature control. Maintaining exact temperature control over process fluids, molds, vessels, heat exchangers, and packaging equipment is a top priority for effective operations.
We navigate the challenges of the semiconductor industry with custom-engineered and optimized process heating and cooling solutions. Read on to discover (or rediscover) how we’ve combined our 70 years of history and a dedication to quality and superior knowledge to solve the challenges of temperature control in the semiconductor and manufacturing fields.
Thermal Requirements in Semiconductor Manufacturing
Within the global semiconductor industry, temperature plays a crucial role in chip production. Across prefabrication, deposition, and final testing, deviations from the required temperature range can lead to material defects, reduced uniformity, or complete part rejection. Temperature control units (TCUs) must be tailored to maintain stable conditions under both steady-state and transient heat loads because even minor fluctuations in thermal management can lead to contamination and warping.
Achieving maximum yield requires maintaining temperature stability within ±0.01ºC, as even the smallest deviation can cause defects or unwanted reactions. Precision is essential when managing the heat generated by electronic components through dissipation, ensuring proper cooling. It’s why our control systems are typically based on PID architecture. Performance is dependent on proper tuning of proportional, integral, and derivative terms relative to system response characteristics. Systems with higher thermal mass or longer transport delays may need cascade control, where a secondary loop (fluid temperature) stabilizes the primary process temperature.
The Need for Temperature Control
Oxidation and chemical vapor deposition require controlled ramp rates and stable soak temperatures. Without accurate control temperatures, inconsistencies can arise, weakening material properties. By combining precise heating and cooling, each step of semiconductor manufacturing can stay within strict thermal limits, ensuring process stability and maximizing overall yield.
Without a custom-engineered TCU tailored to the demands of a semiconductor application, companies may depend on generic equipment that does not precisely match their operational requirements. This mismatch can lead to decreased control during manufacturing, difficulty maintaining tight temperature tolerances, and increased material losses. Ultimately, these issues emphasize the importance of customization, as a properly engineered unit can operate within narrow thermal limits, provide stable processing, and improve overall yield.
Mokon’s Wide-Operating Range Temperature Control Units
Controlling processes at temperatures below 250ºF (121ºC) is typically achieved using a Mokon water/glycol temperature control unit. As operating temperatures increase, allowable temperature deviation becomes more impactful, requiring tighter control of unit response and stability. Mokon’s thermal oil TCUs and Full-Range TCUs are designed for wide operating ranges and are used where glycol-based units are not suitable. We engineer these units to account for fluid properties, like viscosity fluctuation, as well as heat transfer and flow requirements.
Mokon’s TCUs maximize performance with temperatures up to 650ºF (343ºC). Paired with a Mokon chiller, the Full-Range TCU offers a combination heating and cooling unit all in one package. Mokon’s units are available in multiple sizes and configurations. These include heating capacities up to 144 kW, pumping capacities up to 120 GPM, and rapid cooldown capabilities.
A Mokon oil unit in tandem with an Iceman chiller combines heating and cooling in a single process loop, enabling precise control of heat input and removal. Units are engineered and configured with appropriate cooling, heating, and pumping capacities to meet the specific demands of semiconductor manufacturing applications.
The Right Design, Every Time
All Mokon TCUs are qualified for service by rigid, simulated field tests, and are 100% factory-calibrated and run tested. Control systems utilize microprocessor-based controllers designed for closed-loop PID control, configured based on system-specific thermal dynamics. System configurations can be adjusted to meet most application requirements, including variations in heating and cooling capacity, pump sizing, and integration with customer control systems.
Mokon is available to help you navigate the semiconductor industry and create the custom oil-based temperature solution that’s right for you. Reach out to us at any time using our website, www.mokon.com/contact.
Custom Engineered Temperature Control in the Semiconductor Industry and Manufacturing
June 1, 2026